Reference

[1] Aiyer, A., Tianheng Wang, and Helen Simson. "Optical inspection technologies for 3D packaging." Chip Scale review 19 (2015): 1-5.

[2] Lu, Enhui, et al. "Observation of ground surface roughness values obtained by stylus profilometer and white light interferometer for common metal materials." Surface and Interface Analysis 54.6 (2022): 587-599.

[3] 借力三大工具，精準量測樣品表面粗糙度 | TechNews 科技新報 https://technews.tw/2021/03/09/ist-march-wli-afm-xrr/

[4] WLI 實驗手冊

[5] 操作軟體:profilmonline